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ISTRESS -Pre-standardisation of incremental FIB micro-milling for intrinsic stress evaluation at the sub-micron scale

Project details:

Start date 1/01/2014 - end date 31/12/2016
Total cost: € 8 615 106,78
EU contribution: € 6 135 868

Call for proposal:  FP7-NMP-2013-LARGE-7

Abstract:

Intrinsic (or residual) stresses, resulting from manufacturing or processing steps, mostly define the performance and limit the lifetime of nanostructured materials, thin films, coatings and MEMS devices.
The established techniques for micron-scale measurement of residual stress still have strong limitations, e.g. in terms of spatial resolution, lack of depth sensing, their applicability on non-crystalline materials or accessibility to industry.
In this project, a European consortium is established to develop an innovative, highly reproducible and automated measurement protocol for the analysis of residual stress on a sub-micron scale, based on incremental focused ion beam (FIB) milling, along with high-resolution in situ Scanning Electron Microscopy (SEM) imaging and full field strain analysis by digital image correlation (DIC).
The activities will focus on the implementation and pre-standardisation of automated FIB-SEM, DIC and inverse stress calculation procedures, under official project liaisons with both CEN and VAMAS, together with the analysis and modelling of FIB induced artefacts and stress-structure-properties relationship for the selected materials and devices.
The final aim of the project will be the development of innovative design rules, implemented into simulation and optimization tools under coordination of industry partners, for the production of residual stress-controlled nanostructured materials, with specific focus on (i) multi-layered nano-coatings, (ii) micro/nano-crystalline and amorphous materials, (iii) MEMS and 3D metal interconnects.
The project is expected to realize a breakthrough in measurement, standardization and modelling ability of the residual stress distribution at the sub-micron scale.
The measurement techniques and the simulation tools will provide SMEs in particular with enabling technologies for the design and efficient production of innovative micro-devices with improved performance and substantially reduce development costs.

Participants:

UNIVERSITA DEGLI STUDI ROMA TRE - Italy - Coordinator

NPL MANAGEMENT LIMITED  United Kingdom

THE CHANCELLOR, MASTERS AND SCHOLARS OF THE UNIVERSITY OF OXFORD  United Kingdom

FRIEDRICH-ALEXANDER-UNIVERSITAET ERLANGEN NUERNBERG  Germany

MONTANUNIVERSITAET LEOBEN  Austria

FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV  Germany

Eidgenössische Technische Hochschule Zürich  Switzerland

UNIVERSITA DEGLI STUDI DI BRESCIA  Italy

ROBERT BOSCH GMBH  Germany

BERLINER NANOTEST UND DESIGN GMBH Germany

TESCAN BRNO SRO Czech Republic

TESCAN A.S.  Czech Republic

THALES SA France

TECHNISCHE UNIVERSITAET DARMSTADT Germany

 

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